|
| |
FIZIKA A 13 (2004) 4 , 151-160
 
PARAMETRIZATION OF ELECTRON ENERGY DISTRIBUTION FUNCTION IN GLOW
DISCHARGE PLASMA UNDER RF ELECTROMAGNETIC FIELDS
A. A. AZOOZ
Department of Physics, College of Science, Mosul University, Mosul, Iraq
Received 28 April 2004; revised manuscript received 25 October 2004
Accepted 6 December 2004 Online 2
February 2005
A set of twenty four plasma glow discharge experiments using radio-frequency
electromagnetic fields were carried out. The discharge pressure was 27 Pa. Dried air was
used as the discharge gas. Axial radio-frequency fields between 0.6-1.2 MHz were applied.
Four different values of the RF field intensity were used. For each case, the plasma
Langmuir probe characteristics were measured. A computational method was used to extract
the electron energy distribution function in each case. Values of the plasma density and
plasma temperature were obtained directly from the fits. They compare well with values
obtained using the conventional logarithmic method. The Maxwellian behaviour of the
distribution function was established to hold in many but not in all cases.
PACS numbers: 52.25.-b, 51.30.+i
UDC 531.742
Keywords: plasma glow discharge, electron energy distribution, plasma density, plasma
temperature, deviations from Maxwellian distribution
|
