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FIZIKA A 9 (2000) 2 , 87-94
OXYGEN REFLEX PLASMA DIAGNOSTICSEMIL BARNA, VANIA COVLEA, HORIA ANDREI and EMIL I. TOADER Faculty of Physics, The Bucharest University, P.O. Box MG-11, Received 4 January 2000; Accepted 4 May 2000An oxygen reflex discharge was investigated. The voltage-current characteristics of the discharge have been measured at pressures between 6.65×10-2 Pa and 13.3 Pa (5×10-4 to 10-1 torr). Other discharge parameters, i.e. electron temperature and plasma concentration, were determined for three different discharge currents using Langmuir electrostatic-probe technique. A sheath theoretical model gave us another set of results for plasma concentration which confirmed the results obtained by the probe technique. Concentrations obtained (about 1017 m-3) are very high, comparable to those in RF reactors, so the reflex plasma can be used for technological purposes. PACS numbers: 52.80.Sm, 52.55.Dy
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Copyright by The Croatian Physical Society
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