FIZIKA A 9 (2000) 4 , 177-186
MEASUREMENTS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN TWO
DIFFERENT REGIONS OF DC-MAGNETRON SPUTTERING DEVICE
F. F. ELAKSHARa, M. A. HASSOUBAb and A. A.
aPhysics Department, Faculty of Science, Azhar
bPhysics Department, Faculty of Science, Benah University,
Received 6 March 2000; revised manuscript received 5 September 2000
Accepted 12 February 2001
The electron energy distribution function (EEDF) at the edge of the cathode fall and
positive column regions of Ar and He glow discharge were measured using a single Langmuir
probe. The EEDF in the cathode fall region was found to be non-Maxwellian where two groups
of electrons were detected. The two groups have no chance to be thermalized since they
leave the cathode fall region fast. Sources of the two groups of electrons are discussed.
Moreover, EEDF in the positive column region was found to be Maxwellian for both gases.
Electrons have a chance to thermalize themselves due to the long plasma lifetime in this
PACS numbers: 52.80.Hc, 52.80.Sm
Keywords: Ar and He glow discharge, electron energy distribution function, cathode
fall and positive column region