FIZIKA A 15 (2006) 1 , 35-50

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ON THE APPLICABILITY OF DIFFERENT METHODS OF XRD LINE PROFILES ANALYSIS IN ESTIMATING GRAIN SIZE AND MICROSTRAIN IN TUNGSTEN THIN FILMS

IGOR DJERDJa1 ANĐELKA TONEJCa,  ANTUN TONEJCa and NIKOLA RADIĆb
aE-mail address: idjerdj@phy.hr

aDepartemnt of Physics, Faculty of Science, University of Zagreb, Bijenička 32,
P. O. Box 331, HR-10002 Zagreb, Croatia
bRuđer Bošković Institute, Bijenička c. 54, P.O.Box 180, HR-10002, Zagreb, Croatia

Dedicated to the memory of Professor Zvonko Ogorelec

Received 21 October 2004;  revised manuscript received 24 May 2005
Accepted 12 September 2005    Online 10 November 2006

Different methods of X-ray diffraction line profile analysis (XRDLPA) are used to study microstructural parameters such as crystallite size (diffracted domain size), microstrain and texture in tungsten thin films deposited on glass by DC magnetron sputtering at different substrate temperatures and at different working-gas pressures. The whole-pattern analysis within the Rietveld method, the "single-line" method and "double Voigt" method (equivalent to the Warren-Averbach method) are applied and mutually compared. In addition, the results obtained by the Scherrer method are also discussed. The line broadening has been found to be isotropic, supporting the reliability of usage of the Rietveld method in the size-microstrain extraction.

PACS numbers: 68.55.-a, 61.72.Dd,
UDC 538.975, 539.26

Keywords: tungsten thin film, X-ray diffraction, grain size, microstrains

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