FIZIKA A 4 (1995) 2, 81-94

LEAK DETECTION LIMIT OF COUNTER-FLOW TYPE LEAK DETECTOR

GENICHI HORIKOSHI
National Laboratory for High Energy Physics (Emeritus Professor), Kashiwada 3322-7, Ushiku-shi, Ibaraki, 300-12, Japan

Received 7 April 1995

Paying attention to a two-inlet turbomolecular pump and a new counter-flow leak detector proposed by G. Reich, we made a general survey of leak-detection systems. Among many types of leak-detection systems, we selected several of them, including a system with a new type counter-flow leak detector, and analysed their performances. To evaluate leak-detection performance of the systems, minimum detectable leak and time constant of response are introduced. In terms of these quantities, we evaluate the leak-detection performance of the systems, and explore the leak-detection limit.

UDC 539.1.074
PACS 07.30.Hd

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