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FIZIKA A 4 (1995) 2, 361-366
 
FRICTION CHARACTERISTICS OF R. F. MAGNETRON SPUTTERED
C AND C:N THIN FILMS
JAROSLAV SOBOTA
Institute of Scientific Instruments ASCR, Kralovopolska 147, CZ-612 64 Brno, Czech
Republic
Received 7 April 1995
Revised manuscript received 14 June 1995
Carbon and C:N layers were prepared using the commercially available Leybold-Heraeus Z
550 radio frequency magnetron sputtering plant. A graphite target of high purity (99.999 %
C) was used. The tribological testing was performed with a reciprocating ball-on-disc
tribometer. The sliding distance on the coating was defined as the time at which a scoring
occurs, and the friction coefficient exhibits an abrupt increase. From this, and from the
known amplitude of the reciprocating ball, the sliding distance was evaluated.
UDC 538.975
PACS 62.20.-x
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