|
| |
FIZIKA A 4 (1995) 2, 381-387
 
MORPHOLOGICAL DESCRIPTION OF COMPOSITE FILMS
RUDOLF HRACH and NGUYEN LE HUONG
Faculty of Mathematics and Physics, Charles University V Holešovičkách 2,
180 00 Prague 8, Czech Republic
Received 7 April 1995
Revised manuscript received 1 August 1995
The initial stages of growth of thin metal films, in two-dimensions (discontinuous
metal films on dielectric substrates) and in three-dimensions (plasma-chemically prepared
composite films), are studied by a combination of direct measurement and modelling. For
the analysis of photographs of films from the transmission electron microscope and the
description of spatial distribution of objects, various methods of mathematical morphology
were used. The interpretation of the derived characteristics and the extension of the
analysis for composite films were performed by the computer experiment. As a result,
morphological methods sensitive for the characterisation of distribution of objects in the
third dimension were found.
UDC 538.975
PACS 68.55.Jk
|
