FIZIKA A 5 (1996) 2, 71-77

INFLUENCE OF DEPOSITION ANGLE OF UPPER ELECTRODE ON RESPONSE TIME OF RELATIVE-HUMIDITY SENSORS

KAROL POŽUN, BOŠTJAN PARADI Z and JAN LESKOVŠEK
Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia

Received 7 September 1995 

Construction and testing of thin-film capacitive relative-humidity sensors, using a polymer film as dielectric, are presented. Methods of deposition of the upper electrode, which must have proper electrical conductivity and be porous to assure a quick response to changes of relative humidity in the environment, is discussed. The upper electrodes were deposited by vacuum evaporation of Ni, Cr and Ni-Cr alloy. The angle of incidence of evaporated material was varied with the aim to change porosity and, therefore, the response time.

UDC 538.971
PACS 68.35.-p

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