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FIZIKA A 7 (1998) 3, 119-131
 
GRAZING-INCIDENCE SMALL-ANGLE SCATTERING OF SYNCHROTRON RADIATION ON
NANOSIZED TiO2 THIN FILMS OBTAINED BY CHEMICAL VAPOUR DEPOSITION AND SPRAY
METHOD
MAGDY LUČIĆ-LAVČEVIĆ1, ALEKSANDRA TURKOVIĆ2,
DAMIR ŠOKČEVIĆ2, PAVAO DUBČEK2,4, OGNJEN MILAT3,
BOŽIDAR ETLINGER1, PETER LAGGNER5 and HEINZ AMENITSCH4,5
1Department of Physics, Faculty of Technology, University
of Split, Teslina 10/V,
21000 Split, Croatia
2Institute Ruđer Bošković, P. O. Box 1016, 10000 Zagreb, Croatia
3Institute of Physics, University of Zagreb, P. O. Box 304, 10000 Zagreb,
Croatia
4Sincrotrone Trieste S.c.p.A., ss. 14, km 163,5 Basovizza, 34012 Trieste, Italy
5Institute for Biophysics and X-ray Structure Research, Austrian Academy of
Sciences, Steyrerg 17, 8010 Graz, Austria
Received 16 February 1998;
Accepted 21 September 1998
Nanosized TiO2, 1 mm thick, films on glass
substrate were prepared using chemical vapour deposition (CVD) and spray method procedure.
The average grain size < R > ,
obtained by grazing-incidence small-angle scattering of synchrotron radiation (GISAXS)
varied with the annealing temperature (500 to 900 °C
in H2, O2 and N2) for the CVD prepared samples. For TiO2
films obtained by the spray method, < R
> increased with annealing temperature from 4.2 to 7.2 nm. Specific surface
areas of both films were also determined and varied from 0.18·107 to 3.2·107
cm-1.
PACS numbers: 68.55.-a, 68.15.Ef, 68.15.Rs
UDC 538.975
Keywords: TiO2 thin films, chemical vapour deposition, deposition by spraying,
annealing, size of grains, GISAXS
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