FIZIKA A 7 (1998) 3, 119-131

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GRAZING-INCIDENCE SMALL-ANGLE SCATTERING OF SYNCHROTRON RADIATION ON NANOSIZED TiO2 THIN FILMS OBTAINED BY CHEMICAL VAPOUR DEPOSITION AND SPRAY METHOD

MAGDY LUČIĆ-LAVČEVIĆ1, ALEKSANDRA TURKOVIĆ2, DAMIR ŠOKČEVIĆ2, PAVAO DUBČEK2,4, OGNJEN MILAT3, BOŽIDAR ETLINGER1, PETER LAGGNER5 and HEINZ AMENITSCH4,5

1Department of Physics, Faculty of Technology, University of Split, Teslina 10/V,
21000 Split, Croatia
2Institute Ruđer Bošković, P. O. Box 1016, 10000 Zagreb, Croatia
3Institute of Physics, University of Zagreb, P. O. Box 304, 10000 Zagreb, Croatia
4Sincrotrone Trieste S.c.p.A., ss. 14, km 163,5 Basovizza, 34012 Trieste, Italy
5Institute for Biophysics and X-ray Structure Research, Austrian Academy of Sciences, Steyrerg 17, 8010 Graz, Austria

Received 16 February 1998;
Accepted 21 September 1998

Nanosized TiO2, 1 mm thick, films on glass substrate were prepared using chemical vapour deposition (CVD) and spray method procedure. The average grain size < R > , obtained by grazing-incidence small-angle scattering of synchrotron radiation (GISAXS) varied with the annealing temperature (500 to 900 °C in H2, O2 and N2) for the CVD prepared samples. For TiO2 films obtained by the spray method, < R > increased with annealing temperature from 4.2 to 7.2 nm. Specific surface areas of both films were also determined and varied from 0.18·107 to 3.2·107 cm-1.

PACS numbers: 68.55.-a, 68.15.Ef, 68.15.Rs
UDC 538.975


Keywords: TiO2 thin films, chemical vapour deposition, deposition by spraying, annealing, size of grains, GISAXS

 

 
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